Industry Patents
Patent: 6168832
Three-Dimensional masking Method for Control of Coating Thickness
(Click image for PDF of full patent)
| Patent Number: |
6168832 |
| Title: |
Three-Dimensional masking Method for Control of Coating Thickness |
| Abstract: |
A method of vacuum depositing a layer or layers on a substrate includes
controlling thickness distribution of the layer or layers over the
substrate by a three-dimensional mask (64) located between the substrate
48 and a vapor source (56). In one example a circular mask (64R) is
divided by radially-extending spaced-apart walls (90) dividing the mask
into radially-extending apertures (98) for allowing passage of gaseous
coating material through the mask from a source to the substrate. The mask
and substrate are rotated with respect to the source. The vapor
transmission of the apertures is directly related to the height and
spacing of the walls. The height and/or angular-spacing of the walls is
varied over the mask for spatially varying thickness of the layer or
layers over the substrate.
|
| Country of Issue: |
US |
| First Named Inventor: |
Boucher |
| Assignee: |
Coherent |
| Continuation or Divisional of: |
5993904 |
| International Classification: |
C23C 14/04 |
| US Classification: |
427/248.1 |
| Issue Date: |
01-02-2001 |
| Filing Date: |
01-20-1999 |
| Application : |
09/233903 |
| Notes: |
|
| Link to Patent at freepatentsonline.com: |
6168832 at Freepatentsonline |
| Link to World Patent Family1: |
World Patent Family at European Patent Office |
| Link to Google Patents1: |
6168832 at Google Patents |
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after the patent has issued - they take a while to get new patents in their systems.
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