Industry Patents
Patent: 5993904
Three-Dimensional masking Method for Control of Coating Thickness
(Click image for PDF of full patent)
| Patent Number: |
5993904 |
| Title: |
Three-Dimensional masking Method for Control of Coating Thickness |
| Abstract: |
A method of vacuum depositing a layer or layers on a substrate includes
controlling thickness distribution of the layer or layers over the
substrate by a three-dimensional mask (64) located between the substrate
48 and a vapor source (56). A plurality of conduits (52) extends through
the mask from one side to the other for allowing passage of gaseous
coating material from a source to the substrate. The length of the
conduits is inversely related to the throughput of the conduits for
gaseous coating material, and thus the amount of gaseous coating material
transmitted by the conduits. The conduit lengths are graded over the mask
to provide corresponding gradation of a deposited layer.
|
| Country of Issue: |
US |
| First Named Inventor: |
Boucher |
| Assignee: |
Coherent |
| Continuation or Divisional of: |
|
| International Classification: |
C23C 14/04 |
| US Classification: |
427/248.1 |
| Issue Date: |
11-30-1999 |
| Filing Date: |
07-14-1997 |
| Application : |
08/891750 |
| Notes: |
|
| Link to Patent at freepatentsonline.com: |
5993904 at Freepatentsonline |
| Link to World Patent Family1: |
World Patent Family at European Patent Office |
| Link to Google Patents1: |
5993904 at Google Patents |
1. The Google Patents and World Patent Family links will likely not work until a few weeks
after the patent has issued - they take a while to get new patents in their systems.
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